Material box feeding machine Loader

Helium leak detector series for semiconductor applications

The NFICON UL6000 helium leak detector is designed to meet the requirements of the most demanding leak detection applications. UL6000 adopts INFICON proprietary software algorithms I · CAL and HYDRO · S, and adopts a vacuum design that has been verified on site, providing testing flexibility, high sensitivity, and fast and accurate results, making any leak detection application fast and simple. UL6000 can achieve rapid response within all testing ranges, with an extremely short entire cycle time from reaching testing conditions to obtaining final results. This specially designed vacuum architecture can provide sustained high-speed helium pump speed and extremely fast response, meeting your needs.

Efficient leak testing

Leak detection is both time-consuming and complex. By measuring the rate of rise (RoR), semiconductor and vacuum equipment are continuously monitored during operation. After the overall leak test shows a leak, use helium injection to locate the leak location for necessary repairs. Next is another leak test using pressure increase or so-called vacuum decay measurement - a complex process that needs to be repeated until all leaks are detected. In addition, in order to be as accurate as possible, the measurement time of this program is usually particularly long for large device volumes. Thanks to our intelligent rise rate function I. RISE, the new UL6000 Fab PLUS can now perform pressure rise measurements separately and combine it with helium injection (helium injection) methods. Our patented system significantly reduces measurement time, thereby helping to minimize the general time for leak testing and wafer fab equipment maintenance. Experience faster and more advanced.

Optimizing Leak Testing with SMART Spark I. BOOST and SPRAY Check

SMART Spark's large helium bottles and bulky hoses enhance leak detection capabilities. It simplifies the process, reduces manual helium flow adjustment, and minimizes errors to the greatest extent possible. This tool makes leak detection faster, simpler, and more reliable, while maintaining lower helium consumption and background levels.

Advantage

HYDRO-S (HYDROgen Suppression) can quickly meet testing conditions.
UL6000 Fab PLUS - Other Advantages
　 -With I-RISE, our intelligent rise rate: provides pressure rise testing inside the equipment, combined with helium injection (helium injection) method
　 -Complete the measurement of rise rate within 10 seconds
　 -Helps minimize the general time for leak testing and factory equipment maintenance to the greatest extent possible
　 -Faster and more precise
I-CAL (Intelligent Leakage Rate Calculation Algorithm) ensures rapid response to leaks within all testing ranges.
The special multi inlet turbo molecular pump can provide optimal helium pump speed and high helium compression rate at all pressures, thereby providing excellent sensitivity, fast response, and cleaning.
Turbomolecular pumps can provide extremely fast response to any test object, including maximum capacity and maximum chamber.
The validated INFICON fan-shaped magnetic field mass spectrometer adopts a fault free and maintenance free design, which can still provide accurate and reproducible results after several years.
The self-protection function can protect the UL6000 from helium and particle contamination, and even has an automatic flushing cycle to ensure that the UL6000 is always available.
Rotating display/control interface and optional remote manual controller provide operational flexibility.
Access control to device and system software can be enabled through software to prevent unauthorized use or accidental modification of test settings.
Upgrade software via email to ensure your UL6000 is always in optimal working condition.
New workstation design with an optimal height workbench, equipped with anti-static mats and toolboxes for easy testing.